Samsung Electro-mechanics Co., Ltd.

Kyoo Yeon Park

Yong Sik Kim

Suk M Choi

A tuning fork vibratory MEMS gyroscope for sensing angular velocity and angular acceleration generated due to the rotation of a movable body. The tuning fork vibratory MEMS gyroscope includes an external fixed support portion formed on a substrate; a plurality of external elastic members; first and second external frames respectively including driving combs; first and second driving electrodes respectively including comb drivers; first and second internal elastic members respectively including a plurality of spring members; first and second internal frames respectively including sensing combs; and first and second sensing electrodes respectively including comb sensors. The tuning fork vibratory MEMS gyroscope withstands a noise at a peripheral area, is driven at the external portions of internal frames, is sensed at the internal portions of the internal frames, and comprises the elastic members having a wine glass shape, thereby being more stably operated.

Tuning fork vibratory MEMS gyroscope

Seismic inertias are attached to the ends of the arms of elastic plate. Piezoelectric elements are adhered to the upper surfaces of the arms and the elastic plate is supported in the center by a support. When rotation force is applied to the arms of the elastic plate, the arms bend towards opposite direction. The piezoelectric elements are suppressed or extended by the elastic force, thereby they generate electric signals. Rotation directions and angular acceleration velocity can be detected by processing those signals.

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Suwon, South Korea

Kyoo Yeon Park