Massachusetts Institute of Technology

Kyoo Chul Park

George Barbastathis

Gareth H McKinley

Hyungryul Johnny Choi

Jeong-gil Kim

Robert E Cohen

Chih-Hao Chang

Inverted Nanocone Structures and Its Fabrication Process. The method of fabricating nanotextured structures includes making a master mold having an array of tapered structures to be replicated. The master mold is pressed into a curable polymer supported on a substrate and the polymer is cured. Thereafter, the mold is detached from the cured polymer to form the nanotextured structure.

Inverted nanocone structures for multifunctional surface and its fabrication process

Fabrication method. At least first and second hardmasks are deposited on a substrate, the thickness and materials of the first and second hardmask selected to provided etch selectivity with respect to the substrate. A nanoscale pattern of photoresist is created on the first hardmask and the hardmask is etched through to create the nanoscale pattern on a second hardmask. The second hardmask is etched through to create the desired taper nanocone structures in the substrate. Reactive ion etching is preferred. A glass manufacturing process using a roller imprint module is also disclosed.

Process for making nanocone structures and using the structures to manufacture nanostructured glass

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Cambridge, MA, United States of America

Kyoo Chul Park