Globalfoundries Singapore Pte. Ltd.

Kyongjin Hwang

Robert J Gauthier, Jr

Raunak Kumar

Robert Gauthier

Structures for an electrostatic discharge protection device and methods of forming same. The structure comprises a semiconductor substrate including first and second trench isolation regions positioned in the semiconductor substrate. The first trench isolation region extends to a first depth in the semiconductor substrate, and the second trench isolation region extends to a second depth in the semiconductor substrate. The second depth is greater than the first depth. A bipolar junction transistor structure includes a collector, an emitter, and a base each disposed in the semiconductor substrate. The collector includes a portion that extends to the top surface of the semiconductor substrate, the first trench isolation region is positioned in the base, the second trench isolation region is positioned in a lateral direction between the portion of the collector and the base, and the second trench isolation region surrounds the base, the emitter, and the first trench isolation region.

Electrostatic discharge protection devices with multiple-depth trench isolation

The present disclosure relates to semiconductor structures and, more particularly, to electrostatic discharge (ESD) devices and methods of manufacture. The structure includes a bipolar transistor device, including a base region, having a base contact region, in a first well of a first conductivity type, a collector region, having a collector contact region, in a second well of a second conductivity type, and an emitter region, having an emitter contact region, in the first well, located between the base contact region and the second well, and a reverse-doped resistance well, of the second conductivity type, located in the first well of the first conductivity type between the base contact region and the emitter contact region structured to decrease turn-on voltage of the bipolar transistor device.

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Singapore, Singapore

Kyongjin Hwang