Kabushiki Kaisha Toshiba

Tokyo Shibaura Denki Kabushiki Kaisha

Kyoichi Tatsuno

Toshiya Umeda

Ikuo Watanabe

Ryoichi Hirano

A registration system for registering a target registration object with respect to a predetermined reference position by using a registration mark formed on the target registration object includes the intensity measurement step of receiving a mark image for a predetermined period of time by a storage type sensor while an area of the target registration object which includes the mark is illuminated, the storage type sensor having elements whose positional relationship is known with respect to the mark image, the process of obtaining a center position of the mark image on the storage type sensor in a positioning direction in accordance with outputs from the elements of the storage type sensor obtained in the intensity measurement step, the distance calculation step of calculating a distance between the reference position and the center position obtained by the process, and the moving step of moving the target registration object by a distance corresponding to the distance obtained in the distance calculation step.

Registration method and apparatus therefor

Optical fiber sensor having function of compensating for all drifting

Temperature measuring device utilizing birefringence in photoelectric

An optical system for irradiation comprising a light source, a lens, an optical fiber, a rectangular waveguide, an objective lens and a prism and an optical system for receiving light comprising an objective lens, an aperture and an optical fiber are arranged with their optical axes intersecting one another at a point P in a measuring volume. In the optical system for irradiation, the light emitted from the optical fiber and having an intensity distribution expressed by a normal distribution curve is changed to a light having a uniform intensity distribution and a rectangular cross section, which is irradiated through the prism to the point p in the measuring volume. A light scattered at an angle of 90.degree. by a particle flowing through the measuring volume is guided through the optical system for receiving light to a photodetector which converts the scattered light to an electric signal (current) called a scattered light pulse. An arithmetic unit calculates the particle size from the height of this scatterd light pulse and the flow speed from the pulse width.

Particle size measuring apparatus

A particle size measuring apparatus irradiates a number of particles to be measured with a laser beam, measures a light intensity pattern scattered by the particles to be measured, and calculates a relative particle size distribution of the particles to be measured from the measured value obtained. The apparatus has a laser unit, a collimator lens for collimating a laser beam from the laser unit into a parallel laser beam and irradiating the particles to be measured with the parallel laser beam, an optical shield, interposed between the collimator lens and the particles to be measured, for shielding scattered light by the collimator lens and allowing passage of only parallel components of the laser beam, a detecting section consisting of a plurality of optical fibers arranged at an equal distance from a measurement region and at predetermined scattering angles and photodetectors connected thereto, and an arithmetic operating circuit for calculating a relative particle size distribution of the particles to be measured from the scattered light intensity pattern detected by the detecting section.

A droplet size measuring apparatus of the forward scattering method, wherein particles to be measured in a scattering zone having a predetermined scattering path length are irradiated with parallel laser beams. The irradiated beams are scattered by the particles and the scattering beams are detected by the photodetectors arranged at predetermined scattering angles. The output of the photodetectors are input to an arithmetic operating unit, thus the intensity distribution I(.theta.) of the scattered beams is measured. The droplet size distribution n(D) is calculated from the intensity distribution I(.theta.) using the following equation:

Apparatus for measuring a droplet size distribution based on the

A particle diameter measuring device for measuring the particle diameter distribution of a number of particles to be measured, wherein a laser beam guided through a radiating optical fiber is re-formed by collimator lenses into parallel beams having an adequate diameter and is then irradiated onto the particles to be measured; a plurality of optical fibers are arranged along a circle whose center is a point P located in the particles, the receiving end of any of the optical fibers being directed toward point P. The optical fibers receiving the scattered light are arranged close to one another in the range of small scattering angles, while they are roughly arranged in the range of large scattering angles. A transmitted light enters into that optical fiber which is so arranged as to coincide with the laser beam incident direction, the intensity of this transmitted light being detected by a photodetector. Light scattered at various angles, which angles are formed with reference to the laser beam incident direction, is received by the other optical fibers, their intensities being detected by the other photo-detectors. The transmission factor t=Iout/Iin in calculated from the intensity of the transmitted light. The particle diameter distribution n(D) is calculated in the form of relative values, using the angular distribution I(.theta.) of the scattered light intensity. The particle diameter distribution N(D) is calculated in the form of absolute values, using t, n(D) and light pass length L. On the while, particle diameter distribution N(D) or n(D) can be measured with high accuracy, independently of the diameter of the particles. Since it is easy to measure the scattered light intensities in a range of scattering angles from 0.degree. to 30.degree., the particle diameter distribution of particles, the diameter thereof are smaller than 0.1 .mu.m, can be obtained.

Growing community of inventors

Yamato, Japan

Kyoichi Tatsuno