Hitachi-high-technologies Corporation

Hitachi Electronics Engineering Co., Ltd.

Kyoichi Mori

Noritake Shizawa

Akihiro Miyauchi

Masahiko Ogino

Koji Tsushima

Satoshi Ishii

Susumu Komoriya

Toshinori Sugiyama

Naoaki Yamashita

Fujio Yamasaki

Takashi Ando

Teruaki Tokutomi

Ryuta Washiya

Tetsuhiro Hatogai

Toshimitsu Shiraishi

Tsutomu Nakadai

Masanori Fukawa

Shinji Homma

Takashi Nakakita

Takanori Yamasaki

Nobuyuki Iizuka

Kuniaki Toda

Tsutomu Hongo

Miho Sasaki

A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.

Device and method for transferring micro structure

The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a resin composition that contains a silsesquioxane derivative as a major constituent having a plurality of polymerizable functional groups, another polymerizable resin component having a plurality of polymerizable functional groups and different from the silsesquioxane derivative, and a photopolymerizable initiator, in which the content percentage of the photopolymerizable initiator is equal to or more than 0.3 mass % and equal to or less than 3 mass % relative to a total mass of the silsesquioxane derivative and the polymerizable resin component, and the micro structure layer permits equal to or more than 80% of light to pass therethrough at a wavelength of 365 nm.

Nano-imprinting resin stamper and nano-imprinting apparatus using the same

A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin composition that mainly contains a silsesquioxane derivative containing a plurality of polymerizable functional groups, and one or plural kinds of monomer elements containing a plurality of polymerizable functional groups.

Micro-pattern transferring stamper

An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous transferring property of the resinous stamper, and to allow accurate and continuous transferring. In order to achieve the above object, the present invention provides a stamper for transferring fine pattern, including: a fine structure layer on a supporting substrate, in which the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.

Stamper for transferring fine pattern and method for manufacturing thereof

An object of the present invention is to provide a micropattern transfer method and a micropattern transfer device in which the small amount of resin is applied to a substrate, and the nonuniformity in thickness is prevented to arise on the obtained pattern forming layer. In order to achieve the above object, the present invention provides a micropattern transfer method in which a micropattern is transferred to a resin by pressing a stamper having the micropattern onto the resin applied to a substrate, including the steps of: applying the resin to a surface of the substrate discretely in order to obtain a plurality of resin islands so that a center portion of each of the resin islands forms a planar thin-film, and a peripheral portion of the resin island rises higher than the center portion.

Micropattern transfer method and micropattern transfer device

An inspection method and inspection apparatus of a magnetic disk are provided. A gliding test and a certification test are performed at the same time by simultaneously moving a head for the certification test and a head for the gliding test with a heat distortion utilization mechanism (a micro thermal actuator) along a recording surface of the magnetic disk during rotation at a predetermined revolving speed. A flying height of the head for the gliding test is determined according to a revolving speed of the disk. When the flying height of the head for gliding test is determined according to the revolving speed at the certification test, the head for the gliding test is adjusted to a desired height by adjusting a variation of the heat distortion utilization mechanism disposed on the head for the gliding test. The gliding and certification inspections can be performed at the same time.

Inspection method and inspection apparatus of magnetic disk

A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.

Fine-structure transfer apparatus

A fine-structure transfer method in which a fine-featured pattern formed on one of the two surfaces of a stamper is pressed against a coating of a resist on one of the two surfaces of a transfer element so as to transfer the fine-featured pattern to the resist coating, wherein the atmosphere in the space between the stamper and the transfer element is replaced by the vapor of the resist before the stamper is pressed against the transfer element.

Fine-structure transfer method

In a micropattern transfer device, a stamper on which a fine indented pattern is formed is brought into contact with a material to be transferred, and the fine indented pattern on the stamper is transferred onto a surface of the material to be transferred. The micropattern transfer device includes a holding mechanism which holds an entire outer circumferential portion of the material to be transferred. The holding mechanism holds the material to be transferred such that a distance between the material to be transferred and the stamper is substantially equal to or shorter than a distance between the holding mechanism and the stamper.

Micropattern transfer device

A fine-structure transfer apparatus includes a stamper, a stage on which to place a transfer element having a coating of resist, and a device for heating the resist coating to be vaporized or a device for supplying a vapor of the resist into a space between the stamper and the transfer element.

Fine-structure transfer apparatus and method

A nanoimprint stamper can simultaneously conform to two types of anomaly in the shape of a transfer substrate, for example warpage and surface protrusions (including foreign objects) that differ greatly in the wavelength of variation. The nanoimprint stamper is capable of performing transfer with a smaller number of defects and in a uniform way. The nanoimprint stamper includes a light-transmitting rigid substrate, a light-transmitting resilient plate, a light-trarsmitting and flexible rigid stamper base, a light-transmitting stamper buffer layer, and a light-transmitting patterned stamp layer. The stamper buffer layer has a lower Young's modulus than the patterned stamp layer.

Nanoimprint stamper and a fine-structure transfer apparatus using the stamper

An optical imprinting device capable of simultaneously imprinting fine patterns to both surfaces of an opaque substrate is provided. The imprinting device includes a stamper having a fine pattern on its surface to imprint the fine pattern onto a surface of an object to be imprinted by pressing the stamper against the object composed of a substrate and a photo-curing resin layer formed on the substrate. The imprinting device further includes a light source for applying light to the photo-curing resin layer of the object when imprinting the fine pattern of the stamper onto the photo-curing resin layer of the object. The light source applies light to the stamper at a predetermined incident angle to the surface of the stamper.

Imprinting device

An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.

Imprint apparatus

In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works between the relay stand and the work feed container and the work accommodation container is performed at the first relaying point and a load/unload process of works between the relay stand and the plurality of work inspection machines is performed at the second relaying point.

Work handling mechanism and work inspection system

A resin stamper is provided that is intended for use in an optical transfer-based nanostructure transfer apparatus and which is capable of automatic transport and alignment. The resin stamper includes a support member made of a light transmitting material and having mechanical strength, an intermediate layer also made of a light transmitting material, and a patterned resin layer which is also made of a light transmitting material. The support member is larger in size than the intermediate layer and the patterned resin layer. The intermediate layer is more flexible than the patterned resin layer. Also, the patterned resin layer has a pattern of high and low areas formed in a surface thereof that is the obverse of the pattern of high and low areas in a mold.

Growing community of inventors

Oiso, Japan

Kyoichi Mori