Elemental Scientific, Inc.

Samsung Electronics Co., Ltd.

Kyle W Uhlmeyer

Daniel R Wiederin

Tyler Yost

Jonathan Hein

Kevin Wiederin

David Diaz

Austin Schultz

Jae Seok Lee

James W Harris

Jacob Unnerstall

Michael Paul Field

Patrick Sullivan

Jaeyoung Kim

Sooyeon Kim

So Young Kim

Gary J Barrett

Aaron T Williams

Paul Field

Myung Hwan Kim

Min-Soo Suh

Cole J Nardini

Daesung Kim

Junghee Shin

Suyeon Jeong

Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

System for collecting liquid samples

Systems and methods for analyzing ultra-low level concentration nanoparticles in semiconductor cleaning chemicals by single particle inductively coupled plasma mass spectrometry (spICP-MS) are described. In aspects, the methods described herein include determination factors that are specific to each of the chemical matrix and the type of analyte associated with the nanoparticles present in a fluid sample for both a particle baseline intensity value and a nanoparticle detection threshold.

Nanoparticle analysis for ultra-low level concentrations of nanoparticles in fluid samples

A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.

System for collecting liquid samples from a distance

Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.

System for collecting liquid samples and transporting over distances while maintaining a liquid sample segment

Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.

Automatic sampling of hot phosphoric acid for the determination of chemical element concentrations and control of semiconductor processes

Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system, embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.

Systems and methods are described for calibrating an analytical instrument analyzing a plurality of sample matrices in series. A system embodiment can include, but is not limited to, a sample analysis device configured to receive a plurality of samples from a plurality of remote sampling systems and to determine an intensity of one or more species of interest contained in each of the plurality of samples; and a controller configured to generate a primary calibration curve based on analysis of a first standard solution having a first sample matrix by the sample analysis device and generate at least one secondary calibration curve based on analysis of a second standard solution having a second sample matrix by the sample analysis device, the controller configured to associate the at least one secondary calibration curve with the primary calibration curve according to a matrix correction factor.

Systems and methods for ICPMS matrix offset calibration

Systems and methods are described for heating sample transfer lines between a source of a sample and a detection system to detect analytes of interest in the sample, where the sample is maintained in a heated state to maintain dissolved analytes of interest in solution.

Sample transfer line heating system and methods of sample transfer

Systems and methods for heating a spray chamber outlet are described. A system embodiment includes, but is not limited to, a conductive body portion defining an aperture to receive a spray chamber outlet; and an internal cartridge heater coupled to the conductive body portion, the internal cartridge heater configured to regulate a temperature of the conductive body portion to inhibit condensate formation within the spray chamber outlet.

Heating system for spray chamber outlet

A sample introduction system providing variable online dilution of a sample is described. In one or more implementations, a device includes a spectrometry analysis system that employs example techniques in accordance with the present disclosure includes an inline dilution environment, including a first valve assembly configured to prepare a sample by accepting at least one of the sample, a diluent, a carrier, or an internal standard, where the first valve assembly includes a first sample loop; and a second valve assembly configured to prepare the sample by accepting the sample from the first valve assembly, where the second valve assembly is coupled to the first valve assembly, and where the second valve assembly includes a second sample loop.

Rapid inline preparation of a diluted sample

A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling system for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.

System for collecting liquid sample

A dual spray chamber apparatus is described. In one or more implementations, the dual spray chamber apparatus includes a first cyclonic spray chamber for receiving an aerosol and conditioning the aerosol to separate a first conditioned portion of the aerosol from a second portion of the aerosol. The first cyclonic spray chamber defines a first chamber interior and comprises an input port in fluid communication with the first chamber interior. The dual spray chamber apparatus also includes a second spray chamber coupled with the first cyclonic spray chamber for receiving the first conditioned portion of the aerosol and further conditioning the first conditioned portion of the aerosol. The second spray chamber defines a second chamber interior and comprises an output port for expelling a first further conditioned portion of the first conditioned portion of the aerosol from the second chamber interior.

Growing community of inventors

Omaha, NE, United States of America

Kyle W Uhlmeyer