Average Co-Inventor Count = 8.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Entegris, Inc. (1 from 787 patents)
2. Advanced Technology Materials, Inc. (622 patents)
1 patent:
1. 10385452 - Source reagent-based delivery of fluid with high material flux for batch deposition