Harris Corporation

Mks Instruments, Inc.

Imagine Communications Corp.

Hbc Solutions, Inc.

Ky Thoai Luu

Aaron T Radomski

Wayne Douglas Duello

Aaron Michael Burry

Jesse N Klein

Larry J Fisk, Ii

Ross Reinhardt

Amish Rughoonundon

Matthew G Harrington

Philip Charles Schmitt

Dave Coffta

Anders S Mattsson

Carlos G Abascal

Douglas J Posey

David Geier

David Roger Koontz

Ii Larry J Fisk

A clamp configured to be coupled to a printed circuit board to cool and compress one or more electrical connections subject to repeated power and thermal cycling. A first conductive column of the clamp is configured to compress a first electrical connection between a first power device lead and a first printed circuit board trace of the printed circuit board, and draw thermal energy away from the first power device lead. The first conductive column extends from a load spreading plate. The load spreading plate is an insulator that electrically isolates a fastener extending therefrom from the first conductive column. The fastener is configured to cooperate with the circuit board to connect the clamp to the circuit board, compress the load spreading plate against the first conductive column to compress the first electrical connection, and connect the clamp to ground.

Cooling and compression clamp for short lead power devices

A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.

Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber

A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

Pulsed, bidirectional radio frequency source/load

A power supply circuit includes a power amplifier that receives a direct current (DC) voltage from a first power source. A control signal applied to the power amplifier causes the power amplifier to convert the DC voltage to an alternating current (AC) output signal. The AC output signal is applied to a transformer that includes a first winding, a second winding, and a third winding. The first winding receives the AC output signal and the second winding receives an output current that varies in accordance with the AC output signal to apply current to a load. A rectifier includes a plurality of diodes configured to rectify a voltage across the third winding and clamp the voltage at the load. Return power from the third winding may be returned to the first power source.

Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuits

A multi-phase (N) power supply is presented having current shared power factor correction. This includes N input rectifier filters each receiving a respective different one of an N phase AC input signal and providing therefrom one of N rectified signals. N single phase power factor correction pre-regulators each receive a respective different one of the rectified signals and provide therefrom a regulated signal. A current sharing N way to single way multiplexing switch network receives the N regulated signals and provides therefrom a single output signal.

Multiple phase power supply having current shared power factor correction

A pulse step modulator employs a plurality of series connected unit step power amplifier modules. Each module is turned on by a turn-on signal to provide a unit step voltage of a given value. An output circuit is connected to the modules for providing an output voltage to a load and wherein the output voltage is a multiple of the unit step voltages in dependence upon the number of modules that are turned on. The modules are sequentially turned on in a given order and are turned off in the reverse order. An encoder provides turn-on signals with each turn-on signal being applied to a selected one of the modules. The number of turn-on signals provided varies as a function of the magnitude of a time varying input signal. A controller alternately turns enables or disables (in a swapping manner) one of a pair of associated modules as the magnitude of the input signal increases and decreases.

Alternating digital RF modulation

A digital amplitude modulation (AM) transmitter with pulse width modulating RF drive is presented. A plurality of RF amplifiers, each, when turned on, amplifies an applied RF drive signal by the same amount to provide a unit step RF output. An encoder supplies turn-on signals to turn on a number of the RF amplifiers wherein the number varies as a function of the value of an applied audio signal. The width of the unit step RF output is varied as a function of the number of the RF amplifiers that are turned on.

Digital amplitude modulation transmitter with pulse width modulating RF drive

A power supply for an RF transmitting tube while protecting the tube from a high voltage arc event. The supply includes a rectifier circuit configured to be connected to an AC voltage supply and having an output circuit that supplies a DC voltage to a load including the tube and wherein the DC voltage may have a ripple voltage thereon. A control circuit is located intermediate the output circuit and the load for reducing any ripple voltage. The control circuit includes a series solid state switch that is connected in series between the rectifier circuit and the load. The control circuit also includes a reference capacitor coupled to the output circuit and to the load for supplying a reference voltage to the switch so that a voltage at the output circuit that exceeds the reference voltage will be clipped to reduce the voltage that is applied to the load.

Inductive output tube (IOT) control circuit

A circuit for use in a broadcast transmitter for adaptively compensating for carrier signal distortions caused by amplitude modulating an RF carrier signal. The circuit includes a modulator/amplifier network that receives an RF carrier signal and modulates it by a received amplitude varying signal to obtain therefrom a modulated carrier signal which may exhibit distortions caused by the amplitude modulating of the RF carrier signal. A digitally adaptive corrector precorrects the amplitude varying signal prior to application thereof to the network to compensate for any modulated carrier signal distortions. This includes a digital processor that provides signal correction as a function of digital samples representing amplitude variations of the modulated RF carrier signal.

Digitally adaptive modulated transmitter

A pulse width modulator is presented herein and it includes a pulse width driver circuit that receives a time varying ramp signal that is modulated by a time varying analog input signal to produce a pulse width modulated drive signal comprised of turn-on pulses having widths that vary with variations in the magnitude of said input signal. A switch is turned on by each drive pulse for a time duration dependent upon the duration of each drive pulse and provides an output signal therefrom. A negative bias amplifier provides a negative bias signal that has pulsations that are synchronized with said drive pulses but of opposite phase. A combiner combines output signal with the negative bias signal to provide a combined output signal.

Pulse width modulator circuit having negative bias

A pulse width modulation apparatus includes a load circuit, a signal switch, a shunt switch, and a resistor. The signal switch isolates the load circuit from a voltage source along a signal path. The shunt switch is connected to the signal path at a point between the signal switch and the load circuit. The shunt switch isolates the signal path from a ground voltage. A resistor is connected in series between the signal switch and the shunt switch.

Pulse width modulator having reduced signal distortion at low duty cycles

An RF amplifier system having improved power supply is presented and which includes a plurality of power amplifiers each having an output circuit for connecting a DC voltage source to one of a plurality of primary windings located on a first transformer. The first transformer has a plurality of secondary windings located thereon with each being a single turn secondary winding. The secondary windings are connected together in series. A second transformer is located in a cascaded arrangement with the first transformer and has a like plurality of single turn primary windings connected together in series and a like plurality of secondary windings are on said second transformer with each being connected to a rectifier for providing a controlled DC voltage.

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Mason, OH, United States of America

Ky Thoai Luu