Samsung Electronics Co., Ltd.

Kweonjae Lee

Dongwon Lim

A capacitor in a semiconductor device may include a lower electrode, a dielectric layer including a metal oxide and disposed on the lower electrode, a first material layer including aluminum oxide (AlO) and disposed on the dielectric layer, a second material layer including titanium oxynitride (TiON) and disposed on the first material layer, and an upper electrode disposed on the second material layer, wherein the first material layer is between the dielectric layer and the second material layer, and the dielectric layer is between the lower electrode and the first material layer.

Growing community of inventors

Hwaseong-si, South Korea

Kweonjae Lee