Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (1 from 3,797 patents)
2. Korea Advanced Institute of Science and Technology (1 from 2,634 patents)
1 patent:
1. 10535514 - Method of sealing open pores on surface of porous dielectric material using iCVD process