Samsung Display Co., Ltd.

Kwanyong Lee

Sangmok Nam

Jaeho Byeon

Hyun-Woo Kim

Nayoung Lee

A deposition apparatus, including: a substrate supporter, wherein a substrate is fixed to the substrate supporter; a target facing the substrate; a first magnet assembly disposed below the target and including a first magnet extending in a first direction and having a first length, and a second magnet at least partially surrounding the first magnet; and a second magnet assembly disposed below the target and spaced apart from the first magnet assembly in a second direction which is substantially perpendicular to the first direction, and including a first magnet extending in the first direction and having a second length greater than the first length, and a second magnet at least partially surrounding the first magnet, and wherein the second magnet of the first magnet assembly and the second magnet of the second magnet assembly have substantially the same length as each other in the first direction.

Depositing apparatus

A magnet module includes at least one magnet unit. The magnet unit includes a first magnet member and a second magnet member surrounding the first magnet member in a plan view. The first magnet member extends along a first direction and includes a middle portion and an end portion. The first magnet member includes a first portion, which is disposed in the middle portion and extends along the first direction, and a second portion, which is disposed in the end portion and has a width greater than a width of the first portion.

Growing community of inventors

Seoul, South Korea

Kwanyong Lee