Samsung Electronics Co., Ltd.

Kwangrak Kim

Jongmin Yoon

Junbum Park

Inkeun Baek

Suhwan Park

Ikseon Jeon

Kyungwon Yun

Chiyoung Lee

Yunje Cho

Gilwoo Song

Martin Priwisch

Seunggun Byoun

Younghoon Shin

Taeyong Jo

Jangryul Park

Wonki Lee

Soonyang Kwon

Yoonsung Bae

Seungho Gwak

A method of manufacturing a semiconductor device includes forming a pattern on a wafer, measuring a spectrum of the pattern on the wafer, with a spectral optical system, performing an analysis of the spectrum through a deep learning model for predicting pattern characteristics, the deep learning model being trained based on a domain knowledge, and evaluating the pattern on the wafer based on the analysis of the spectrum, wherein the domain knowledge includes a noise inducing factor of the spectral optical system.

Method of training deep learning model for predicting pattern characteristics and method of manufacturing semiconductor device

An inspection apparatus includes an inspection signal source configured to irradiate a wafer with an inspection ray having a frequency in a range of 0.1 terahertz (THz) to 10 THz, a curved rail, a probe mount configured to move along the curved rail, and first and second probes coupled to the probe mount, wherein the first probe is configured to detect the inspection ray transmitted through the wafer, and the curved rail has a curved surface convex toward the first and second probes.

Inspection apparatus and inspection method using same

A spectroscopic measuring apparatus and method are provided. The apparatus includes a first light source, object, microlens, and imaging lenses, an optical fiber, a spectrometer and a position controller. The object lens to allows light from the first light source to be incident on a stage configured to support a measurement object. The microlens is disposed between the object lens and the stage. The imaging lens images light reflected from the measurement object. The optical fiber has an input terminal disposed on a first image plane of the imaging lens. The spectrometer is disposed at an output terminal of the optical fiber. The position controller controls positions of the object lens, the microlens, and the optical fiber, and adjusts the position of the object lens so that a focus of the object lens is positioned at a virtual image position of a virtual image generated by the microlens.

Spectroscopic measuring apparatus and method, and method for fabricating semiconductor device using the measuring method

Growing community of inventors

Gunpo-si, South Korea

Kwangrak Kim