Electronics and Telecommunications Research Institute

Korea Advanced Institute of Science and Technology

KwangHeum Lee

Chi-Sun Hwang

Jong-Heon Yang

Jae-Eun Pi

Ji Hun Choi

Seunghee Lee

SangHee Park

A vertical channel thin film transistor includes substrate, lower source/drain electrode, spacer layer, upper source/drain electrode covering portion of upper surface of the spacer layer, interlayer insulating pattern covering portion of upper surface of the upper source/drain electrode and upper surface of the spacer layer exposed by the upper source/drain electrode, contact hole disposed on the lower source/drain electrode and passing through the interlayer insulating pattern, the upper source/drain electrode, and the spacer layer, active pattern covering inner wall and bottom surface of the contact hole and extending over upper surface of the upper source/drain electrode and upper surface of the interlayer insulating pattern, gate insulating pattern filling portion of the contact hole and extending along upper surface of the active pattern, and gate electrode filling portion of the contact hole and extending along upper surface of the gate insulating pattern.

Vertical channel thin film transistor and method for manufacturing the same

Growing community of inventors

Daejeon, South Korea

KwangHeum Lee