Samsung Electronics Co., Ltd.

Kwang-Woon Lee

Wook-Sung Son

Jang-Hyeok Lee

Hyen-Young Choi

An inspection system for inspecting a wafer and an inspection method thereof are provided. The inspection system includes a rotating means for turning and arranging a wafer to an inspection position, an angle measuring means for measuring a rotational angle used by the rotating means to rotate to the inspection position, an inspection apparatus for acquiring inspection data associated with the wafer, and a controller for determining an amending angle from the rotational angle and for amending the inspection data in accordance with the amending angle to calculate amended inspection data, wherein the amended inspection data reflects a state of the wafer on the rotating means.

Inspection system and a method for inspecting a semiconductor wafer

An apparatus and method for controlling a brushless DC motor, which minimizes a torque ripple thereof, and includes a power converting unit to convert alternating current (AC) power to polyphase AC power and to supply the polyphase AC power to the brushless DC motor. A rotator position/speed detecting unit detects status information of a rotator. A terminal voltage detecting unit detects variations of terminal voltages of the polyphase AC power. A control unit detects phase commutation periods of the polyphase AC power using the status information provided from the rotator position/speed detecting unit and the terminal voltage variation information of the polyphase AC power provided from the terminal voltage detecting unit. The control unit controls the power converting unit to supply a compensation voltage used to constantly maintain a mean voltage of a non-commutation phase of the polyphase AC power during the detected phase commutation periods.

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Seoul, South Korea

Kwang-Woon Lee