Samsung Electronics Co., Ltd.

Kwang Wook Choi

Seokwhan Chung

IIhwan Kim

A sensor device includes: a support structure having a cantilever shape extending in a first direction and having a first end fixed; a sensing element having a surface and a resonant frequency changing according to contaminants adsorbed to the surface and disposed at a second end of the support structure; a frequency detector configured to detect the resonant frequency of the sensing element; and an actuator disposed at the one end of the support structure and configured to move the support structure so that the second end of the support structure moves in a second direction perpendicular to the first direction.

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Suwon-si, South Korea

Kwang Wook Choi