Samsung Display Co., Ltd.

Samsung Electronics Co., Ltd.

Samsung Mobile Display Co., Ltd.

Kwang-Nam Kim

Beung-Hwa Jeong

Jong-Woo Sun

Jung-Pyo Hong

Sang-Rok Oh

Gyoo-Chul Jo

Ji-Su Ahn

Yun-Sik Ham

Young-Ro Jung

Sung-Chul Kim

Cheol-Ho Yu

Eui-Hoon Hwang

Jeongryul Kim

Sung-Wook Jung

Hae-Joong Park

Nam-Young Cho

Byeong-Hee Kim

Jae-Yong Lee

Chang-Soo Kim

Hyung-Jun Kim

In-young Jung

Beong-Ju Kim

Yong-Moon Jang

Sang-Dong Kwon

Sung-Yeon Kim

A semiconductor manufacturing apparatus includes a loadlock module including a loadlock chamber in which a substrate container is received, wherein the loadlock module is configured to switch an internal pressure of the loadlock chamber between atmospheric pressure and a vacuum; and a transfer module configured to transfer a substrate between the substrate container received in the loadlock chamber and a process module for performing a semiconductor manufacturing process on the substrate, wherein the loadlock module includes a purge gas supply unit configured to supply a purge gas into the substrate container through a gas supply line connected to the substrate container; and an exhaust unit configured to discharge a gas in the substrate container through an exhaust line connected to the substrate container.

Loadlock module and semiconductor manufacturing apparatus including the same

A substrate support apparatus includes a substrate stage to support a substrate, and a ground ring assembly along a circumference of the substrate stage, the ground ring assembly including a ground ring body, the ground ring body having a plurality of recesses along a circumferential portion thereof, and a plurality of ground blocks movable to be received into respective recesses of the plurality of recesses, the plurality of ground blocks including a conductive material to be electrically grounded.

Substrate support apparatus and plasma processing apparatus having the same

Provided are substrate processing apparatuses including a temperature measurement unit. The substrate processing apparatus comprises a chamber including a substrate processing region, a dielectric sheet that is disposed on the substrate processing region and includes an insertion hole and a temperature measurement unit that is disposed on the dielectric sheet to measure the temperature of the dielectric sheet, and has a screw portion inserted into the insertion hole, wherein each of the insertion hole and the screw portion has thread helixes meshed with each other.

Substrate processing apparatus

A substrate cleaning system including a carrying unit having a plurality of rollers for carrying a substrate, wherein each of the rollers includes a roller shaft and a plurality of division rollers coupled to the roller shaft, and wherein a gap between adjacent ones of the roller shafts is larger than a radius of each of the division rollers; a first rinse unit located along the carrying unit and configured to apply a first cleaning liquid onto the substrate; and a cleaning unit comprising a slit nozzle and configured to apply a second cleaning liquid to the substrate after it encounters the first rinse unit.

System and method for cleaning substrate

An apparatus for cleaning a substrate is disclosed. The apparatus includes a first chamber through which a substrate is conveyed, a second chamber where an oxide film formed on the substrate conveyed from the first chamber is removed; and a third chamber that discharges the substrate conveyed from the second chamber to the outside after rinsing the substrate, wherein the first chamber and the third chamber are disposed on top and on bottom.

Apparatus for cleaning substrate

An organic light emitting display apparatus includes a substrate; a display unit formed on the substrate and comprising an organic light emitting device; and a touch panel formed on the display unit, wherein the touch panel further includes a sealing substrate, a ground layer formed on a surface of the sealing substrate, a first pattern layer formed on a surface of the sealing substrate opposite to the surface of the sealing substrate on which the ground layer is formed, a first insulating layer formed on the first pattern layer, a second pattern layer formed on the first insulating layer, and a second insulating layer formed on the second pattern layer.

Organic light emitting display apparatus and method of manufacturing the same

The present invention relates generally to a thin film transistor, an organic light emitting diode (OLED) display including the same, and manufacturing methods of them. The thin film transistor comprises: a substrate; a gate electrode disposed on the substrate; a gate insulating layer disposed on the gate electrode; a semiconductor layer disposed on the gate insulating layer; an inter layer dielectric disposed on the entire surface of the substrate; and source and drain electrodes disposed on the inter layer dielectric and connected to the semiconductor layer, and in which the gate electrode is disposed so as to correspond to the entire surface of the semiconductor layer, and a manufacturing method thereof. The organic light emitting diode (OLED) display comprises the elements of the thin film transistor described above, and also includes an insulating film disposed on the entire surface of the substrate, and a first electrode, an organic layer, and a second electrode disposed on the insulating film, the first electrode being electrically connected to any one of the source and drain electrodes, and the gate electrode is disposed so as to correspond to the entire surface of the semiconductor layer.

Thin film transistor, organic light emitting diode (OLED) display including the same, and manufacturing methods of them

An organic light emitting diode display and a fabrication method thereof, the display including a substrate; a thin film transistor on the substrate; and an organic light emitting diode on the substrate, the organic light emitting diode including a pixel electrode, an organic emission layer, and a common electrode, wherein the organic emission layer includes a red (R) pixel, a green (G) pixel, and a blue (B) pixel, the pixel electrode includes a first pixel electrode, a second pixel electrode, and a third pixel electrode that respectively correspond to the red pixel, the green pixel, and the blue pixel, the first pixel electrode, the second pixel electrode, and the third pixel electrode each have different thicknesses, and the first pixel electrode, the second pixel electrode, and the third pixel electrode each include a first hydrophobic layer.

Method of fabricating organic light emitting diode display

A thin film transistor (TFT), including a crystalline semiconductor pattern on a substrate, a gate insulating layer on the crystalline semiconductor pattern, the gate insulating layer having two first source/drain contact holes and a semiconductor pattern access hole therein, a gate electrode on the gate insulating layer, the gate electrode being between the two first source/drain contact holes, an interlayer insulating layer covering the gate electrode, the interlayer insulating layer having two second source/drain contact holes therein, and source and drain electrodes on the interlayer insulating layer, each of the source and drain electrodes being insulated from the gate electrode, and having a portion connected to the crystalline semiconductor pattern through the first and second source/drain contact holes.

Method of fabricating thin film transistor

Organic light emitting diode display having a multi-color pixel including a hydrophobic layer

Thin film transistor, method of fabricating the same, and organic light emitting diode display device including the same

An organic light emitting display apparatus including: a substrate having a display area; a thin film transistor (TFT) disposed in the display area of the substrate; an electrode power supply line disposed outside the display area of the substrate; a first insulating layer covering the TFT and having a first open portion through which a portion or a whole top surface of the electrode power supply line is exposed; and a second insulating layer disposed on the first insulating layer and having a second open portion through which the first open portion of the first insulating layer is exposed, so that the second insulating layer does not contact the electrode power supply line.

Structure of organic light emitting display apparatus

The present embodiments relate to an etchant and a method of fabricating an electric device including a thin film transistor. The etchant includes a fluorine ion (F) source, hydrogen peroxide (HO), a sulfate, a phosphate, an azole-based compound, and a solvent. The etchant and method of fabricating an electric device including a thin film transistor, can etch a multi-layered film including copper layer, and a titanium or titanium alloy layer in a batch and can provide a thin film transistor having a good pattern profile at high yield. When reusing the etchant, uniform etching performance can be maintained with a long replacement period of the etchant, and therefore costs can be saved.

Growing community of inventors

Yongin, South Korea

Kwang-Nam Kim