Taiwan Semiconductor Manufacturing Comp. Ltd.

Kwang-Chen Wu

Yuan-Ko Hwang

Long-Sheng Yeou

Hung-Hsin Liu

How-Cheng Tsai

Shih-Shun Chen

A container having an indicator for detecting the presence of chemical elements is provided. In one embodiment, the container comprises a cavity therein for receiving an article having a first metallic element, the cavity being substantially sealed from a surrounding environment outside the container. An indicator is disposed within the sealed cavity, the indicator having a second metallic element with a standard potential less than the standard potential of the first metallic element, whereby a change in state of the second metallic element alerts an operator to the presence of a predetermined chemical element within the container.

Storage container for detecting presence of checmical elements

A method of forming very small silicon nitride spacers in split-gate flash EPROMs is disclosed which prevent the occurrence of &ldquo;write disturb&rdquo;, unwanted reverse tunneling, or erasing. This is accomplished by forming spacers with well controlled dimensions and well defined shapes through a judicious combination of dry etch with wet over-etch technique. The wet etch along with the dry etch widens the process window from a few seconds to several minutes so that the small dimensioned silicon nitride spacers can be better controlled than it has been possible in the past. In a second embodiment, the step of over-etching of the spacers is combined with the step of stripping off of an implant photomask, thus, shortening the manufacturing product cycle.

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Taipei, Taiwan

Kwang-Chen Wu