Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Quantum Global Technologies LLC (3 from 19 patents)
3 patents:
1. 7108002 - Steam cleaning system and method for semiconductor process equipment
2. 6936114 - Steam cleaning system and method for semiconductor process equipment
3. 6648982 - Steam cleaning system and method for semiconductor process equipment