Robert Boschgmbh

Kurt-Ulrich Ritzau

Jochen Reinmuth

Jens Frey

Eckhard Graf

Achim Breitling

Holger Rumpf

A micromechanical device that includes a silicon substrate with an overlying oxide layer and with a micromechanical functional layer lying above same, which extend in parallel to a main extension plane, a cavity being formed at least in the micromechanical functional layer and in the oxide layer. An access channel is formed in the oxide layer and/or in the micromechanical functional layer which, starting from the cavity, extends in parallel to the main extension plane and in the process extends in a projection direction, as viewed perpendicularly to the main extension plane, all the way into an access area outside the cavity. A method for manufacturing a micromechanical device is also described.

Growing community of inventors

Tuebingen, Germany

Kurt-Ulrich Ritzau