Atmel Corporation

Kurt Schertenleib

Bradley J Larsen

A contact of large dimensions having a stringer strongly adhered to a contact hole's sidewalls. The contact hole is made to have a patterned perimeter having grooves protruding outward. The grooves have a size equal to a minimum contact dimension in at least one direction so as to ensure good step coverage into the groove areas. The grooves serve to anchor the stringer to the contact hole sidewalls by increasing the sidewall's surface area which increases adhesion, distributing stress from the stringer to the groove areas, and providing grooves with good step coverage.

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Colorado Springs, CO, United States of America

Kurt Schertenleib