Sumitomo (shi) Cryogenics of America, Inc.

Kurt R Rustin

Matt E Datlen

Nathaniel S Hankel

Shawn C Brown

A capacitance diaphragm gauge (CDG) assembly includes a CDG sensor positioned within a vacuum enclosure, which is maintained at a vacuum. The CDG sensor generates sensor signals responsive to a pressure of an applied gas. The vacuum enclosure provides thermal insulation around the CDG sensor. The CDG sensor is maintained at a selected operating temperature using an internal heater positioned on the CDG sensor. The internal heater is responsive to external heater control signals. The temperature of the CDG sensor is monitored using an internal temperature sensor mounted on the CDG sensor. The temperature sensor generates a temperature signal. The vacuum enclosure includes an end cap that seals the vacuum enclosure. Connectors positioned through the end cap communicate the sensor signals, the heater control signals and the temperature signals through the end cap. The connectors are hermetically sealed to the end cap to maintain the vacuum within the vacuum enclosure.

Thermal insulation system for a capacitance diaphragm gauge

A capacitive diaphragm gauge (CDG) is positioned in a pressure sensing section of a pressure measuring unit. The CDG is heated to maintain the CDG at a temperature selected to reduce contamination build-up on the diaphragm of the CDG. The pressure sensing section is connected to a first mounting interface of a thermal barrier. A second mounting interface of the thermal barrier is connected to an electronics section. The thermal barrier includes a plurality of struts that mechanically interconnect the two mounting interfaces. The struts have sizes selected to be sufficiently large to cantilever the electronics section from the sensing section. The sizes of the struts are selected to be sufficiently small to reduce the heat transfer from the first mounting interface to the second mounting interface to maintain the second mounting interface below a selected maximum temperature. The struts reduce heat transfer without reducing structural integrity.

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San Diego, CA, United States of America

Kurt R Rustin