Carl-zeiss-stiftung Trading As Carl Zeiss

Kurt Franke

Martin Ross-Messemer

Frank Höller

Manfred Weihnacht

Hagen Schmidt

Günter Martin

Alexander Menck

A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate, a surface wave sourceexcitable with an adjustable frequency for producing surface waves on a surfaceof the substrateand an interaction regionof the substrate surfacewhich is provided for the radiation to interact with a grating structure provided by the surface waves produced. To this end, the surface wave sourcemay have a directional characteristic and emits surface waves stronger in a preferred directionthan in a directionopposite thereto, the surface wave source may comprises an electro-acoustic transducer which includes spaced apart sections for emitting surface waves at different wavelengths, an electro-acoustic transducer of the surface wave source may be operated as a voltage divider with an intermediate electrode, the frequency for exciting the surface wave source may be adjusted in response to a measuring signal which is obtained by a surface wave receiver, a surface wave dampermay be provided in the form of an acousto-electric transducer, a closed propagation path may be provided for the surface waves and the grating structure may be formed by standing surface waves. Moreover, an exposure system is proposed which comprises such a diffraction-optical component and a radiation source.

Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system

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Dresden, Germany

Kurt Franke