Airoha Technology Corporation

Kuo-Yu Tseng

Sheng-Yow Chen

Shih-Chieh Chien

An on-chip balun transformer including a primary winding and a secondary winding is provided. The primary winding includes at least one parallel coil and a plurality of first serial semi-turn coils connected to the at least one parallel coil. The secondary winding, magnetically coupled to the primary winding, includes a plurality of second serial semi-turn coils connected to each other. At least one of the second serial semi-turn coils is located within the at least one parallel coil. The primary winding and the secondary winding are coplanar.

On-chip balun transformer

A manufacturing method for the inductor/transformer is disclosed. A simulator is used to simulate the inductance, the quality factor, and the self-resonance frequency of said inductor/transformer to generate at least one group of the area size, the number of the conductive layer, the line width, the number of turns, and/or the line space of the conductive layers and the first conductive layer; the inductor/transformer is manufactured according to the factors. Thereafter, the Monte-Carlo simulation is used to initiate the process variability analysis of the factors of the conductive layer and the first conductive layer, and the geometric size of the inductor/transformer can be modulated according to the results of the process variability analysis during the manufacturing process, such that the inductor/transformer can be manufactured by the process of the generic logic circuit.

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Taoyuan, Taiwan

Kuo-Yu Tseng