Sky Tech Inc.

Kuo-Ju Liu

Ta-Hao Kuo

Ching-Liang Yi

Chi-Hung Cheng

YAO-Syuan Cheng

A gas mixing method to enhance plasma includes: providing a reaction chamber; wherein the reaction chamber includes an accommodating space and the reaction chamber includes a top opening connected to the accommodating space; providing an adapter plate, and fixing the adapter plate to the reaction chamber to be arranged corresponding to the top opening; wherein the adapter plate further includes a window area communicating both sides of the adapter plate; providing a target disposed on top of the adapter plate to seal the top opening; premixing a plasma gas and an auxiliary gas into a gas mixture, and introducing the gas mixture into the accommodating space; and providing a biasing field to the accommodating space.

Growing community of inventors

Hsinchu County, Taiwan

Kuo-Ju Liu