Tpo Displays Corporation

Kuo-Hung Kuo

Wei-Chih Chang

Yu-Chi Chang

Chia-Yi Tsai

Mu-Chia Lee

Wen-Kuei Lai

Hau-Chiun Li

Chi-An Lin

Chun-Wei Huang

Ta-Hsin Kuan

Po-Yi Lo

Hung-Che Lu

Ming-Hsien Yang

Hong-Bin Li

The invention discloses a stacked storage capacitor structure for a LTPS TFT-LCD comprising a processed substrate, a first storage capacitor and a second storage capacitor. The first storage capacitor comprises a first conductive layer, a second conductive layer and a first insulating layer therebetween. The stacked storage capacitor structure further comprises a third conductive layer including a first portion and an extended second portion. The second storage capacitor comprises the second conductive layer, the extended second portion of the third conductive layer and a second insulating layer therebetween.

Stacked storage capacitor structure for a LTPS TFT-LCD

A wet etching apparatus is disclosed. The apparatus comprises a first tank, containing a first wet etching solution; a filter, having a filter cartridge, connected to the first tank to filter out the impurities in the first solution; a second etching tank, connected to the filter and the first tank in parallel, containing a second solution; a reaction tank, connected to the filter, wherein having a wet etching reaction; an exhaust component, connected to the filter and the reaction tank in parallel; a first pump, delivering the first solution to the reaction tank through the filter; and a second pump, delivering the second solution to the exhaust component to exhaust the solution from the etching tank through the filter.

Wet etching apparatus

Growing community of inventors

Kaohsiung, Taiwan

Kuo-Hung Kuo