Industrial Technology Research Institute

Kuo-Hua Wu

Chao-Kai Cheng

Chen-Chu Tsai

Wan-Wen Chiu

Cheng-Yi Wang

Chih-Jian Lin

A supply system capable of providing a working fluid is provided. The supply system includes an access device, a first energizer, a second energizer, a third energizer and an output device. The access device utilized to access the working fluid includes a connecting port. The first energizer provides a first energy to energize the working fluid, thereby expelling the bubbles from the working fluid. The second energizer provides a second energy to energize the working fluid received in the access device, thereby expelling the working fluid through the connecting port of the access device. The output device is connected to the access device, thereby receiving and outputting the working fluid. The third energizer provides a third energy to heat the working fluid passing through the access device and the output device.

Supply system and injection-head structure thereof

A micro-droplet injection apparatus and the injecting process using the same are provided for fabricating a micro-element. The apparatus includes an injection module, a moving stage module, an image detection module, and a temperature controlling module. The injection module is provided for injecting a micro-droplet on a substrate carried on the moving stage module, and the substrate is detected by the image detection module for detecting the relative position and inclined angle between the substrate and a injection head of the injection module. The temperature controlling module is provided for controlling the surface temperature of the substrate, such that the temperature of the substrate and the micro-droplets is balanced, and then the surface flatness of the film plated by micro-droplets is improved. The apparatus operates according to processing requirements of different substrates, achieving a stage multiplex function, and raising operation efficiency.

Growing community of inventors

Hsinchu Hsien, Taiwan

Kuo-Hua Wu