Taiwan Semiconductor Manufacturing Comp. Ltd.

Kuo-Fu Lee

Wen-Hao Chen

Keh-Jeng Chang

Hung-Chih Ou

Hsiang-Ho Chang

A method of process technology assessment is provided. The method includes: defining a scope of the process technology assessment, the scope comprising an original process technology and a first process technology; modeling a first object in an integrated circuit into a resistance domain and a capacitance domain; generating a first resistance scaling factor and a first capacitance scaling factor based on the modeling, the original process technology, and the first process technology; and utilizing, by an electronic design automation (EDA) tool, the first resistance scaling factor and the first capacitance scaling factor for simulation of the integrated circuit.

Growing community of inventors

Hsinchu County, Taiwan

Kuo-Fu Lee