Taiwan Semiconductor Manufacturing Comp. Ltd.

Kuo-Cheng Lin

Yu-Yen Chang

The SMIF pod includes a base having a cassette that may receive one or more wafers in preparation for transferring the wafers. The base includes a plurality of first openings formed on the side surfaces for a latch mechanism. The base includes a window formed on a surface of the base for an operator to read the state of the container. A box having second openings one to one corresponding to said first openings for the latch mechanism with latch member to penetrate through them while in the lock state. An indicator presents a first mark for indicating the locked state at the window or presents a second mark at the window for indicating the unlocked state.

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Hsinchu, Taiwan

Kuo-Cheng Lin