Taiwan Semiconductor Manufacturing Comp. Ltd.

Mstar Semiconductor, Inc.

Kuo-Chen Huang

Shinn-Sheng Yu

Tsai-Sheng Gau

Chih-Ming Ke

Hsin-Yi Ho

Chung-Yi Chen

Jacky Huang

Chang-Shing Chen

Hsiao-Tzu Wang

Yu-Hsi Wang

An image processing method for detecting an image motion information between a first image unit and a second image unit is provided. The first image unit and second image unit respectively comprise a plurality of blocks, and each of the blocks comprises a plurality of pixels. The image motion detection method comprises: analyzing pixels at the same position in all blocks of the first image unit to generate a first image statistical information; analyzing pixels at the same position in all blocks of the first image unit to generate a first image statistical information; and comparing the first image statistical information with the second image statistical information to determine the image motion information.

Image motion detection method, image processing method and apparatus using the methods

A method and a system are provided for calibrating metrological tools used to measure features of a semiconductor device. A critical dimension (CD) ruler defines a known pitch plus a pitch offset. A photoresist layer is measured to determine a measured pitch whereupon the measured pitch is compared to the known pitch. From the comparison, appropriate calibration steps can be taken to reduce the difference between the known pitch and the measured pitch.

Method and system for optimizing sub-nanometer critical dimension using pitch offset

An exhaust monitoring cup which measures exhaust gas flowing through a top opening in a coater cup of a spin coating apparatus used in the deposition of photoresist coatings on semiconductor wafers. The exhaust monitoring cup includes a gas flow cup which is positioned in fluid communication with the top opening of the coater cup. The exhaust gas flows through a gas flow opening in the gas flow cup, and a flow rate measuring apparatus at the gas flow opening receives the exhaust gas and measures the flow rate thereof. The flow rate of the gas leaving the gas flow cup can be compared to the flow rate of the gas flowing from an exhaust conduit leading from the bottom of the coater cup, to facilitate detection of abnormal conditions in the coater cup or exhaust conduit.

Exhaust monitoring cup

A method and apparatus for dispensing ink on an object by utilizing an ink dispensing device mounted on a guide rail system so that the device can be freely moved two-dimensionally for dispensing ink at any desirable location on the surface of an object. The activation of the ink dispensing device can be advantageously controlled by either a foot operated switch, a hand operated switch or a voice operated switch. A counter may optionally be used on the apparatus such that the number of times the activation device was activated can be accurately recorded as an indication of defect counts or any other counts.

Apparatus and method for dispensing ink on an object

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Hsinchu County, Taiwan

Kuo-Chen Huang