Taiwan Semiconductor Manufacturing Comp. Ltd.

Industrial Technology Research Institute

Kuo-Chan Huang

Chien-Hao Chen

Chung-Chiang Wu

Hsien-Ming Lee

Po-Cheng Chen

Chi On Chui

Hung-Chin Chung

Wei-Chin Lee

Pin-Hsuan Yeh

A method includes forming a gate electrode on a semiconductor region, recessing the gate electrode to generate a recess, performing a first deposition process to form a first metallic layer on the gate electrode and in the recess, wherein the first deposition process is performed using a first precursor, and performing a second deposition process to form a second metallic layer on the first metallic layer using a second precursor different from the first precursor. The first metallic layer and the second metallic layer comprise a same metal. The method further incudes forming a dielectric hard mask over the second metallic layer, and forming a gate contact plug penetrating through the dielectric hard mask. The gate contact plug contacts a top surface of the second metallic layer.

Selective hybrid capping layer for metal gates of transistors

A device includes a semiconductor fin, and a gate stack on sidewalls and a top surface of the semiconductor fin. The gate stack includes a high-k dielectric layer, a work-function layer overlapping a bottom portion of the high-k dielectric layer, and a blocking layer overlapping a second bottom portion of the work-function layer. A low-resistance metal layer overlaps and contacts the work-function layer and the blocking layer. The low-resistance metal layer has a resistivity value lower than second resistivity values of both of the work-function layer and the blocking layer. A gate spacer contacts a sidewall of the gate stack.

Gate resistance reduction through low-resistivity conductive layer

The present invention generally relates to a high matching precision organic light emitting diode (OLED) driver by using a current-cascaded method, and more particularly, to a method in which the current-cascaded method is used so as to reduce the driving current mismatching brought about by the drifting in the parameters during different fabrication procedures, and thus improve the display quality. Among the plurality of driving integrated circuits (IC's), the internal circuit of each IC comprises a first operational amplifier, the output of which is connected to a plurality of output transistors that are further connected to a current mirror. The outputs of said plurality of output transistors are connected to other plurality of driving IC's respectively so as to achieve output current matching between other driving IC's.

High matching precision OLED driver by using a current-cascaded method

Growing community of inventors

Hsinchu, Taiwan

Kuo-Chan Huang