Korea Advanced Institute of Science and Technology

Kunmo Koo

Jongmin Yuk

Jungjae Park

Jaesang Lee

Sanghyeon Ji

Namgyu Noh

The present disclosure relates to a fluid chip for an electron microscope including a lower chip, an upper chip, and a fluid channel part for supplying a fluid sample, and may attach a transmissive thin film part of a graphene material having excellent bulging resistance to a plurality of holes formed in a fluid channel part to increase the thickness of a support not serving as a transmissive window thicker than the conventional one, thereby minimizing the loss of a spatial resolution and also suppressing the bulging phenomenon of the transmissive window while supplying the fluid sample more stably. Further, the present disclosure may form an electrode which may be connected with an external electrical supply source in the fluid channel part, thereby analyzing electrochemical or thermochemical reaction of the fluid sample in the fluid channel part in real time.

Liquid chip for electron microscope having excellent bulging resistance

The present disclosure relates to a liquid chip for an electron microscope including a lower chip, an upper chip, and a waterway space part for supplying a liquid sample, and may attach a transmissive thin film layer made of a graphene material having an excellent bulging resistance property to a plurality of holes formed in a waterway space part to increase the thickness of a support not operating as a transmissive window to be larger than the conventional one, thereby supplying the liquid sample more stably and minimizing the loss of a spatial resolution and also suppressing the bulging phenomenon of the transmissive window. To this end, according to the present disclosure, the lower chip includes a lower substrate formed with a lower cavity; a lower support disposed on the upper surface of the lower substrate, and formed with a plurality of lower holes in the lower cavity region; a spacer located on both ends of the lower support of the lower hole; and a lower transmissive thin film layer attached on the lower support so as to cover the lower hole, the upper chip includes an upper substrate formed with an upper cavity; an upper support disposed on the upper surface of the upper substrate, and formed with a plurality of upper holes in the upper cavity region; and an upper transmissive thin film layer having a constant bulging resistance property attached on the upper support so as to cover the plurality of upper holes, the waterway space part is formed by laminating the upper support disposed on the upper surface of the upper substrate on the spacer of the lower chip, and the transmissive thin film layer is located inside the waterway space part.

Growing community of inventors

Daejeon, South Korea

Kunmo Koo