Horiba, Ltd.

Kunio Ohtsuki

Kimihiko Arimoto

Yoko Nakai

Toyoki Kanzaki

This invention is to make the detection sensitivities as even as possible among a plurality of specimens to be inspected in an analyzer that leads light transmitted from the plurality of specimens to be inspected to a single spectrometer via optical fibers, the analyzer includes first and second light guide members provided for every first and second specimen to be inspected so as to lead the light obtained from each of the specimens to be inspected to a photo-detecting part, and light projection side end portions of a plurality of optical fiber elements composing the first and second light guide members are arranged in mixture.

Analyzer

The present invention is to lessen work burden on a user, to eliminate determination error, to prevent a substrate from being damaged, and to prevent prolonged working time by automatically determining whether or not a particle to be removed is present. A particle inspection and removal apparatus of the present invention includes a particle information acquisition section acquiring particle information on a particle adhering onto a substrate surface, a particle removal section removing the particle adhering onto the substrate surface, a comparison section comparing a threshold set for each of regions of the substrate surface with the particle information on each of the region obtained by the particle information acquisition section, and a particle removal control section controlling the particle removal section to remove the particle on the substrate surface based on a comparison result of the comparison section.

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Kyoto, Japan

Kunio Ohtsuki