Otsuka Electronics Co., Ltd.

Kunikazu Taguchi

Nobuyuki Inoue

Kazuaki Ohkubo

Hiroyuki Sano

Naoki Inamoto

Suguru Irie

Yoshimi Sawamura

Shinji Fujimura

An optical measurement apparatus including: an irradiation optical system configured to irradiate a measurement subject with irradiation light that includes a plurality of wavelengths; a reception optical system configured to receive measurement light that is transmission light or reflection light travelling from the measurement subject as a result of the measurement subject being irradiated with the irradiation light; and a polarizing plate, wherein the polarizing plate is configured to be able to be provided in either the irradiation optical system or the reception optical system.

Optical measurement apparatus and optical measurement method

An optical measurement apparatus including: an irradiation optical system configured to irradiate, in a straight direction, a target area that includes a measurement area and a non-measurement area that is an area different from the measurement area, with irradiation light that includes a plurality of wavelengths; a reception optical system configured to receive measurement light that is transmission light or reflection light travelling from the target area as a result of the target area being irradiated with the irradiation light; and a calculation unit configured to generate a reception light spectrum that indicates a relationship between a wavelength and an intensity of the measurement light, for each position in the target area, based on a result of reception of the measurement light performed by the reception optical system, and calculate, for each wavelength, a transmittance or a reflectance of a measurement subject that is placed on the measurement area, based on the reception light spectrum thus generated, wherein the calculation unit calculates a transmittance spectrum or a reflectance spectrum of the measurement subject based on a first criterion spectrum that is the reception light spectrum that is based on the measurement light travelling from the measurement area when the measurement subject is not present on the measurement area, a second criterion spectrum that is the reception light spectrum that is based on the measurement light travelling from the non-measurement area, and a measurement spectrum that is the reception light spectrum that is based on the measurement light travelling from the measurement area when the measurement subject is present on the measurement area.

An optical measurement method with an optical measurement apparatus including an irradiation optical system and a measurement optical system is provided. The optical measurement method includes obtaining a distribution of actually measured values when angles of incidence are different for the same sample, calculating a modification factor depending on an angle of incidence on the measurement optical system from each measurement point in association with a region in the two-dimensional image corresponding to each measurement point in the measurement target irradiated with the measurement light, and calculating optical characteristics including a refractive index of the sample based on a group of pixel values in one row or a plurality of rows along any one direction in the distribution of the actually measured values and a corresponding modification factor.

An optical measurement apparatus includes an irradiation optical system which linearly irradiates a measurement target with measurement light having a certain wavelength range, a measurement optical system which receives linear measurement interference light which is transmitted light or reflected light originating from the measurement target as a result of irradiation with the measurement light, and a processing device. The processing device includes a first calculation module that calculates a modification factor depending on with an angle of incidence on the measurement optical system from each measurement point in association with a region in the two-dimensional image corresponding to each measurement point in the measurement target irradiated with the measurement light and a second calculation module that calculates optical characteristics of the measurement target by applying the corresponding modification factor to a value for each pixel included in the two-dimensional image.

A spectral characteristic measurement method for measuring spectral characteristics of measured light with higher accuracy is provided. The spectral characteristic measurement method includes causing an optical measurement instrument having detection sensitivity in a first wavelength range to receive light in a second wavelength range which is a part of the first wavelength range, obtaining characteristic information indicating a stray light component from a portion of a first spectrum detected by the optical measurement instrument, that corresponds to a range other than the second wavelength range, and obtaining a pattern indicating a stray light component generated in the optical measurement instrument by subjecting the characteristic information to extrapolation processing as far as the second wavelength range in the first wavelength range.

Spectral characteristic measurement method and spectral characteristic measurement apparatus that corrects for stray light

An optical measurement apparatus includes a spectroscopic measurement device, a first optical fiber for propagating light to be measured, a hemispherical portion having a light diffuse reflection layer on an inner wall of the hemispherical portion, and a plane portion disposed to close an opening of the hemispherical portion and having a mirror reflection layer located to face the inner wall of the hemispherical portion. The plane portion includes a first window for directing the light emitted thorough the first optical fiber into an integrating space. The integrating space is formed by the hemispherical portion and the plane portion. The optical measurement apparatus further includes a second optical fiber for propagating the light in the integrating space to the spectroscopic measurement device through a second window of the plane portion.

Optical measurement apparatus, optical measurement system, and fiber coupler

In an automatic optical measurement method according to the invention, with a movable reflection platemoved to place under an optical axis, light projected from a light projecting portionis received by a light receiving portionvia the movable reflection platea stationary reflection plateand the movable reflection platewhereas with the movable reflection platemoved away from the optical axis and a referenceset on a sample stagelight projected from the light projecting portionis received by the light receiving portionvia the referencewhereby a ratio between the intensities of the received lights is determined. During a sample measurement, light projected from the light projecting portionwith the movable reflection platemoved to place under the optical axis is received by the light receiving portionvia the movable reflection plate, stationary reflection plateand movable reflection plateso that the intensity of light thus received and the above ratio are used for estimating an intensity of light to be measured with the reference, the estimated intensity of light being used for correcting an intensity of light received via a sample.

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Hirakata, Japan

Kunikazu Taguchi