Nagano Keiki Co., Ltd.

Kunihiro Yamaura

Kenji Kobayashi

Yukihiko Hata

Toshiaki Okumura

Takayuki Yokoyama

Hiroshi Nagasaka

Kouzou Yamagishi

A method of manufacturing strain-detecting devices is provided. First, plural cylindrical substrates, each of which has one end closed by a diaphragm, are fixedly placed at predetermined positions of a fixing plate. A positioning marker is previously given to the fixing plate. The fixing plate having the substrates is then assembled into a jig. The jig sustains the substrates so that an outer surface of the diaphragm of each substrate is held at the same level. Through positioning the substrates, all the diaphragms are then positioned in place in a plane direction of the fixing plate with reference to the positioning marker. A strain gage portion is simultaneously formed on each of all the diaphragms. The fixing plate is then disassembled from the jig. In this step, the substrates with the strain gage portions, i.e., strain-detecting devices, are separated from the fixing plate.

Method of manufacturing strain-detecting devices

A pipe having a through-hole of smaller diameter than a pressure port is disposed in the pressure port. Therefore, a volume of the pressure port can be reduced by the thickness of the pipe, thereby improving response of a pressure sensor. Furthermore, there is no need for the pressure port having smaller diameter to be provided by drill processing, so that a volume in the pressure port can be easily adjusted. Accordingly, the volume in the pressure port can be reduced with a simple structure to improve response of the pressure sensor.

Pressure sensor

Growing community of inventors

Ohta-ku, Japan

Kunihiro Yamaura