Taiyo Yuden Co., Ltd.

Mutoh Industries Ltd.

Kuniaki Tanaka

Tokihiro Nishihara

Tomonori Yamatoh

Provided is an aluminum nitride film in which, aluminum nitride crystal grains containing a metal element differing from aluminum and substituting for aluminum are main crystal grains of a polycrystalline film formed of crystal grains, and a concentration of the metal element in a grain boundary between the aluminum nitride crystal grains in at least one region of first and second regions corresponding to both end portions of the polycrystalline film in a film thickness direction of the polycrystalline film is higher than a concentration of the metal element in a center region of the aluminum nitride crystal grain in the at least one region, and is higher than a concentration of the metal element in a grain boundary between the aluminum nitride crystal grains in a third region located between the first region and the second region in the film thickness direction of the polycrystalline film.

Aluminum nitride film, piezoelectric device, resonator, filter, and multiplexer

An aluminum nitride film contains a Group IV element and a Group II or Group XII element, and an atomic composition ratio of the Group II or Group XII element to the Group IV element is less than 1.

Aluminum nitride film, acoustic wave device, filter, and multiplexer

A pen holding arm connected to an elevation drive apparatus of a pen head of an automatic lead feed apparatus holds a pen or a writing instrument. The automatic lead feed or supply apparatus has a lead reservoir at one side of an automatic drafting machine provided with the lead feed apparatus, a lead feed shutter drops the lead contained in the lead reservoir one by one. The shutter is controlled to open and shut by a driving force of the pen head. The driving force gives a rotary oscillation and vertical oscillations to the lead reservoir, so that the lead smoothly drops from the lead reservoir into the instrument situated just below the reservoir. The lead is led in depth into the writing instrument by vertical driving of the elevation drive apparatus.

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Tokyo, Japan

Kuniaki Tanaka