Electronics and Telecommunications Research Institute

Kun Sik Park

Kyu Ha Baek

Yong Sun Yoon

Jong Moon Park

Bo Woo Kim

Lee Mi Do

Seong Wook Yoo

Dong Pyo Kim

Ji Man Park

Sang Gi Kim

Dong Yun Jung

Jin Yeong Kang

Jin Gun Koo

Jong Il Won

Byung Won Lim

Yoon Kyu Bae

Hyun Gyu Jang

Doo Hyung Cho

Joo Yeon Kim

Jin-Yeong Kang

Zin Sig Kim

Ye Sul Jeong

Jong Chang Woo

Yong Hyun Ham

Boo Woo Kim

Ju Wook Lee

A MOS controlled thyristor device according to the concept of the present invention includes a substrate comprising a first surface and a second surface, which face each other, gate patterns disposed on the first surface, a cathode electrode configured to cover the gate patterns, and an anode electrode disposed on the second surface, The substrate includes a lower emitter layer having a first conductive type, a lower base layer having a second conductive type on the lower emitter layer, an upper base region provided in an upper portion of the lower emitter layer and having a first conductive type, wherein the upper base region is configured to expose a portion of a top surface of the lower base layer, an upper emitter region having a second conductive type and provided in an upper portion of the upper base region, a first doped region having a first conductive type and a second doped region surrounded by the first doped region and having a second conductive type, wherein the first and second doped regions are provided in an upper portion of the upper emitter region, and a first doping pattern having a first conductive type, which is provided on one surface of the upper portion of the upper emitter region. The first doping pattern is interposed between the upper base region and the first doped region along a first direction parallel to the top surface of the substrate. The first doping pattern is configured to expose a top surface of the upper emitter region on the other surface of the upper portion of the upper emitter region. Each of the gate patterns is configured to cover portions of an exposed top surface of the lower base layer, an exposed top surface of the upper base layer, an exposed top surface of the upper emitter region, a top surface of the first doping pattern, and a top surface of the first doped region. The cathode electrode is configured to cover portions of top and side surfaces of the gate pattern, a top surface of the second doped region, and a top surface of the first doped region. The first conductive type and the second conductive type are different from each other.

MOS(metal oxide silicon) controlled thyristor device

The present invention forms an off-FET channel having a uniform and short length by using a self-align process of a method of forming and recessing a spacer, thereby enhancing the current driving capability of an off-FET and the uniformity of a device operation.

Metal oxide semiconductor-controlled thyristor device having uniform turn-off characteristic and method of manufacturing the same

A nonvolatile memory and a method of manufacturing a nonvolatile memory are disclosed. A nonvolatile memory according to an exemplary embodiment may include a deep well formed on a substrate, a first well formed within the deep well, a second well formed separately from the first well within the deep well, a first metal-oxide-semiconductor field-effect transistor (MOSFET) formed on the first well, and a second MOSFET formed on the second well. According to a method of manufacturing a nonvolatile memory according to an exemplary embodiment, a well region of a control MOSFET of a memory cell may be shared with a control MOSFET of an adjacent memory cell, or a well region of a tunneling MOSFET of a memory cell may be shared with a tunneling MOSFET of an adjacent memory cell, thereby reducing an area of the memory cells. Further, the nonvolatile memory according to the exemplary embodiment may constantly maintain a voltage of a shared well region in the tunneling MOSFET and apply a different voltage to a source/drain from that of an adjacent cell, thereby recording data only in the selected memory cell or deleting recorded data from the selected memory cell while sharing the well region.

Non-volatile memory (NVM) and method for manufacturing thereof

An RFID tag includes: an antenna receiving an RF signal from a reader; an AFE (analog front end) generating voltage using the RF signal; and one or more switches interposed between the antenna and the AFE and controlling the connection between the antenna and the AFE through the switch operation.

RFID tag

An organic light emitting diode (OLED) and a method for manufacturing the same are provided. In the OLED, patterned metal electrodes are positioned on one or more of upper and lower portions of a light emission layer to allow light generated from the light emission layer to emit to an area between the patterned metal electrodes.

Organic light emitting diode and manufacturing method thereof

A via forming method that includes forming via-holes in a substrate is provided. The method includes putting the substrate, having the via-holes, in a first solution to fill the via-holes with the first solution. Metal particles are sunk into the via-holes by supplying a second solution containing the metal particles to the first solution. A first curing process of heat-treating the substrate is performed so as to form vias in the via-holes. A multi-chip package that includes the substrate having the vias is also provided.

Via forming method and method of manufacturing multi-chip package using the same

A complementary metal-oxide semiconductor (CMOS)-based planar type avalanche photo diode (APD) using a silicon epitaxial layer and a method of manufacturing the APD, the photo diode including: a substrate; a well layer of a first conductivity type formed in the substrate; an avalanche embedded junction formed in the well layer of the first conductivity type by low energy ion implantation; the silicon epitaxial layer formed in the avalanche embedded junction; a doping area of a second conductivity type opposite to the first conductive type, formed from a portion of a surface of the well layer of the first conductivity type in the avalanche embedded junction and forming a p-n junction; positive and negative electrodes formed on the doping area of the second conductivity type and the well layer of the first conductivity type separated from the doping area of the second conductivity type, respectively; and an oxide layer formed on an overall surface excluding a window where the positive and negative electrodes are formed.

CMOS-based planar type silicon avalanche photo diode using silicon epitaxial layer and method of manufacturing the same

A BJT (bipolar junction transistor)-based uncooled IR sensor and a manufacturing method thereof are provided. The BJT-based uncooled IR sensor includes: a substrate; at least one BJT which is formed to be floated apart from the substrate; and a heat absorption layer which is formed on an upper surface of the at least one BJT, wherein the BJT changes an output value according heat absorbed through the heat absorption layer. Accordingly, it is possible to provide a BJT-based uncooled IR sensor capable of being implemented through a CMOS compatible process and obtaining more excellent temperature change detection characteristics.

Bipolar junction transistor-based uncooled infrared sensor and manufacturing method thereof

Provided is a wafer exposure apparatus used in a semiconductor device manufacturing process, the exposure apparatus including: a reflective mirror for reflecting light provided from a light source; an optical path changer for changing a path of the light provided from the reflective mirror; first mirrors installed at both sides of the optical path changer to change the path of the light; second mirrors installed at both sides of a material to change the path of the light; and third mirrors installed at both sides of a mask to enter the light reflected by the first mirrors to the mask and to enter the light passed through the mask into the second mirrors, whereby it is possible to continuously expose one surface, both surfaces or a specific surface of a wafer in a state that the wafer is once aligned.

Exposure apparatus

Provided is a method of fabricating a T-type gate including the steps of: forming a first photoresist layer, a blocking layer and a second photoresist layer to a predetermined thickness on a substrate, respectively; forming a body pattern of a T-type gate on the second photoresist layer and the blocking layer; exposing a predetermined portion of the second photoresist layer to form a head pattern of the T-type gate, and performing a heat treatment process to generate cross linking at a predetermined region of the second photoresist layer except for the head pattern of the T-type gate; performing an exposure process on an entire surface of the resultant structure, and then removing the exposed portion; and forming a metal layer of a predetermined thickness on an entire surface of the resultant structure, and then removing the first photoresist layer, the blocking layer, the predetermined region of the second photoresist layer in which the cross linking are generated, and the metal layer, whereby it is possible to readily perform a compound semiconductor device manufacturing process, and to reduce manufacturing cost by means of the increase of manufacturing yield and the simplification of manufacturing processes.

Growing community of inventors

Daejeon, South Korea

Kun Sik Park