Industrial Technology Research Institute

Kun-Ping Huang

Chih-Chen Chang

Yu-Tse Hsieh

Yu-Wen Chi

Jwu-Sheng Hu

Po-Wen Chiu

Chih-Wei Luo

Chwung-Shan Kou

Henry Medina

Jr-Hau He

Li-Ko Yeh

Kun-Yu Lai

Chih-Hsiang Su

Wen-Yen Tzeng

Provided is a focalized microwave plasma reactor. The reactor utilizes a cylindrical microwave resonant cavity of the quasi-TMmode to focalize microwave power and to excite focalized microwave plasma for the processes of microwave plasma enhanced chemical vapour depositions.

Focalized microwave plasma reactor

An operating method of microwave heating device is provided, in which a holder is disposed in a heating chamber, and a plurality of microwave transmitters are arranged outside the heating chamber. A plurality of half-wave-rectified power supplies are provided to connect the microwave transmitters, and the half-wave-rectified power supplies have capacitances respectively. A plurality of longitudinal waveguides and a plurality of transverse waveguides are installed in between the heating chamber and the microwave transmitters. The capacitance of each of the capacitors of the half-wave-rectified power supplies is adjusted, such that the microwave power pulse bandwidth of the microwave transmitters are extended to produce a plurality of overlapped couplings. The half-wave-rectified power supplies supply power to the microwave transmitters, so that the microwaves are guided into the heating chamber by the longitudinal waveguides and the transverse waveguides for exciting multiple microwave modes in the heating chamber.

Operating method of microwave heating device and microwave annealing process using the same

A modular microwave power supply comprises a plurality of microwave power supply modules and a plurality of isolating diodes. To upgrade the output power of the modular microwave power supply, the plurality of microwave power supply modules are connected isolatively in common to a magnetron load by the plurality of isolating diodes, such that power combining of the plurality of microwave power supply modules is achieved, and the efficiency as well as the accumulated-heat dissipating ability of the modular microwave power supply are as good as each of the plurality of microwave power supply modules.

Modular microwave power supply

A multi-mode microwave heating device includes a heating chamber, a plurality of microwave transmitters, a plurality of longitudinal-polarized rectangular waveguides, a plurality of transverse-polarized rectangular waveguides, and a plurality of half-wave-rectified power supplies. The heating chamber has a holder for holding a to-be-heated object. The holder is connected to a rotating and an elevating mechanism. The microwave transmitters are connected to the heating chamber through the longitudinal-polarized rectangular waveguides as well as connected to the transverse-polarized rectangular waveguides for transmitting microwaves into the heating chamber and to excite multiple cavity modes of the heating chamber, so as to achieve uniform microwave heating. An industrial three-phase alternating current (AC) power source offers multi-phased electricity to the half-wave-rectified power supplies, by which the microwave transmitters are powered, such that the multiple modes are decoupled and uniform microwave heating are achieved.

Multi-mode microwave heating device

A metal-doped graphene and a growth method of the same are provided. The metal-doped graphene includes graphene and metal elements, wherein the metal elements accounts for 1-30 at % based on the total content of the metal-doped graphene. The growth method includes performing a PECVD by using a carbon precursor, a metal precursor, and a group VI precursor in order to grow the metal-doped graphene.

Metal-doped graphene and growth method of the same

A method of forming graphene flower is provided, which includes introducing a hydrocarbon gas and an assistance gas into transformer-coupled plasma equipment, and providing a medium-frequency electromagnetic wave to the hydrocarbon gas and the assistance gas by the transformer-coupled plasma equipment to dissociate the hydrocarbon gas, and the dissociated hydrocarbon gas is re-combined to form the graphene flower, wherein the hydrocarbon gas is dissociated at a ratio of greater than 95%.

Graphene flower and method for manufacturing the same and composite material

The disclosure provides a zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same. The zinc oxide anti-reflection layer includes: a zinc oxide lower portion, wherein the zinc oxide lower portion has a nanorod array structure; and a zinc oxide upper portion connected to the zinc oxide lower portion, wherein the zinc oxide anti-reflection layer has a syringe-like structure.

Zinc oxide anti-reflection layer having a syringe-like structure and method for fabricating the same

Disclosed is a method of forming a graphene layer, including: putting a substrate in a chamber of an electron cyclotron resonance device, and then evacuating the chamber. Conducting a carbon-containing gas into the chamber, wherein the carbon-containing gas has a pressure of 10torr to 10torr in the chamber. Heating the substrate until the substrate has a temperature of 100&#xb0; C. to 600&#xb0; C., and using a microwave with an electron cyclotron resonance mechanism to excite the carbon-containing gas to deposit a graphene layer on the substrate.

Method of preparing graphene layer

A method of joining superconductor materials is described. A microwave chamber including a first heat absorption plate and a second heat absorption plate corresponding to the first absorption plate is provided. A first superconductor material and a second superconductor material are disposed between the first heat absorption plate and the second heat absorption plate in the microwave chamber. The first superconductor material and the second superconductor material have an overlapping region therebetween, and a pressure is applied to the first heat absorption plate and the second heat absorption plate. Microwave power is supplied to the microwave chamber. The first heat absorption plate and the second heat absorption plate transform the microwave power into thermal energy so as to join the first superconductor material and the second superconductor material at the overlapping region.

Method of joining superconductor materials

A quantum dot thin film solar cell is provided, which at least includes a first electrode layer, an optical active layer, and a second electrode layer sequentially deposited on a substrate. A plurality of quantum dots is formed in the optical active layer. Since the plurality of quantum dots and the optical active layer are formed through co-sputtering, an interface adhesion between the plurality of quantum dots and the optical active layer is good in this quantum dot thin film solar cell.

Quantum dot thin film solar cell

A microwave-excited plasma device is proposed. The device comprises of a plurality of microwave plasma reaction units which are capable of generating plasma independently such that a large-area plasma is able to be generated by all of the units. Besides, the high cost of the large-area microwave coupling window and its deformation together with possible breakage caused by atmospheric pressure can be prevented. Moreover, when a plurality of permanent magnets is assembled upon each of the plasma reaction units, the microwave-excited plasma device is improved to be a large-area electron cyclotron resonance (ECR) plasma device.

Growing community of inventors

Miaoli County, Taiwan

Kun-Ping Huang