Texas Instruments Corporation

Kun Cindy Pan

David Mehrl

Paul Lawrence Rancuret

Mark Henry Strumpell

Benjamin Lowell Lee

Rand Derek Carr

A digital micromirror device (DMD), a method of manufacturing the DMD and an optical processor incorporating a DMD. In one embodiment, the DMD includes: (1) a first group of micromirrors having a first modulation structure based on a first wavelength of light and a second group of micromirrors having a second modulation structure based on a second wavelength of light, the second wavelength differing from the first wavelength.

Digital micromirror device having wavelength-dependent modulation structure and method of manufacturing the same

A system comprises a spatial light modulator comprising a plurality of modulation elements, the spatial light modulator operable to receive an optical signal comprising one or more optical channels, wherein the elements are operable to perform an optical function on at least one of the one or more optical channels. The system further comprises two or more reset groups associated with the spatial light modulator, wherein each reset group comprises one or more elements, and wherein at least one of the one or more optical channels resides on at least two of the two or more reset groups. The system also comprises a controller operable to actuate the elements of at least one of the at least two reset groups associated with the optical channel at a different time than any one or more other reset group of the at least two reset groups.

System and method for actuation of spatial light modulators

A method and system for measuring the temporal response of a micromirror array to a variety of driving signals. A micromirror array is illuminated with a coherent light source so that a diffraction pattern is reflected from the micromirror array. One or more photodetectors are aligned with spots of light in the diffraction pattern that correspond to orders of the diffraction pattern. Diffraction pattern theory predicts that the intensity of these spots of light will vary as the tilt angle of the micromirrors is changed. Thus, by measuring the relative intensity of the spots of light as the micromirror array is provided with a variety of driving signals, many performance characteristics of the micromirror array can be measured. Some of these characteristics include the impulse response, the forced resonant frequency (i.e. the natural frequency), the damped resonant frequency, the quality factor of the micromirror response, the damping factor of the micromirror response, and the frequency transfer function. According to another aspect of the invention, the electromechanical compliance of the micromirrors in the micromirror array can also be measured. It is further contemplated that all of these measurements can be localized to specific regions on the surface of the micromirror array so that the variance of different characteristics across its surface can be analyzed. Another aspect of the disclosed invention is the measurement of the tilt angle of the micromirror array at a non-biased state.

Method and apparatus for measuring temporal response characteristics of digital mirror devices

A method and system for indirectly measuring the tilt angle of micromirrors in a micromirror array. The method and system aims a coherent light beam through an aperture in a screen so that it reflects off of the surface of the micromirror array and creates a pattern of reflected light on the screen. The micromirror array is loaded with a pattern that has a uniform power spectral density (such as a random, aperiodic pattern or a frequency chirped sinusoidal spatial pattern) whereby certain micromirrors will be placed in the &ldquo;on&rdquo; position and the other micromirrors will be placed in the &ldquo;off&rdquo; position. By loading the micromirror array with a pattern having a uniform power spectral density distribution, the discrete nature of the resulting diffraction pattern is reduced and a pair of &lsqb;sin(x)/x&rsqb; patterns will be generated on the screen. These &lsqb;sin(x)/x&rsqb; patterns can be used to measure a variety of characteristics of the micromirrors, such as tilt angle, &ldquo;roll&rdquo;, and deformation of the mirrors as they are tilted.

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Allen, TX, United States of America

Kun Cindy Pan