Nikon Corporation

Kumiko Ishida

Atsushi Tanaka

Masakazu Sekiguchi

Toru Miyakoshi

Michiyo Ogawa

Chiori Saito

Yasuhiro Omura

Hironori Ikezawa

Provided is a convenient display device including: a display unit capable of projecting a projection image on a domain in accordance with a position of a user; and a judgment unit that judges whether the projection image can be projected on the domain.

Display device and projection device

A projection optical system and exposure method for forming a reduced image of a first surface on a second surface, including forming a projection exposure of a reduced image of a pattern formed on a mask on a photosensitive substrate, the optical path between the projection optical system and the second surface being filled with a medium having a refractive index larger than 1.1 where a refractive index of an atmosphere in the optical path of the projection optical system is 1, and the magnification of the projection optical system being not more than &#x215b;. In variations, the projection optical system is substantially telecentric on both the first surface side and the second surface side; every optical member having a power in the projection optical system is a transmitting optical member; and a projection exposure in a one shot-area can include a plurality of partial exposures in partial exposure regions.

Projection optical system, exposure apparatus, and exposure method

Growing community of inventors

Kawasaki, Japan

Kumiko Ishida