Cymer, Inc.

Kumar Raja Guvindan Raju

Russell Allen Burdt

Matthew Minakais

David Wesley Manley

Systems for maintaining light sources for semiconductor photolithography in which a module making up part of the light source is evaluated at various pulse counts to produce a binary prediction as to whether the module is sufficiently likely to operate without failure in an ensuing sequence of pulses. The binary prediction may be made by a machine learning model trained on metrics extracted from measurements taken on deinstalled modules. A group of models, each trained differently, can be made available according to a selection made by the user or according to the maintenance objectives of the user.

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San Diego, CA, United States of America

Kumar Raja Guvindan Raju