National Taiwan Normal University

Kuang-Che Chang Chien

Yu-Chih Lin

Chau-Jern Cheng

Han-Yen Tu

A method for defect inspection of a transparent substrate comprises utilizing a wavefront reconstruction unit to obtain complex defect diffraction wavefront of a transparent substrate; using a complex defect diffraction module to confirm the effective diffraction distance of the complex defect diffraction wavefront; utilizing a defect detection module to detect position of the defect of the transparent substrate; using a defect classification module to perform extraction, analysis and classification of diffraction characteristics and utilizing a machine learning algorithm or a deep learning algorithm to automatically identify the defects.

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Taipei, Taiwan

Kuang-Che Chang Chien