Brooks Automation Us, LLC

Brooks Automation Gmbh

Krzysztof A Majczak

Robert T Caveney

Daniel Babbs

Robert Chris May

A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.

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Beverly, MA, United States of America

Krzysztof A Majczak