Other

Kris Vossough

Farhang Yazdani

This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor, multi-axis gyroscope or accelerometer. The sensor uses a variety of different Field Effect Transistor technologies (horizontal, vertical, Si nanowire, CNT, SiC and III-V semiconductors) in conjunction with MEMS based structures such as cantilevers, membranes and proof masses integrated into silicon substrates. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electronic design.

FET based sensory systems

This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor or accelerometer. The system uses Fabry-Perot Interferometer in conjunction with beam collimator, beam splitter, optical waveguide and a photodetector integrated. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electrostatic actuators.

Integrated sensory systems

This invention describes the structure and function of an integrated multi-sensing systems in stacked configuration. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor or accelerometer. The method uses Fabry-Perot Interferometer in conjunction with light source and a photodetector integrated in stacked configuration. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electrostatic actuators.

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Palo Alto, CA, United States of America

Kris Vossough