Mitsubishi Heavy Industries Limited

Kozo Wada

Keiichi Sato

Kazuya Tsurusaki

Jae-Young Lee

Kwang-Hee Han

Etsurou Hirai

Yuuji Asahara

Susumu Kamikawa

Toshiro Kobayashi

Hiroko Kitamoto

Kyung-Zoon Min

Atsushi Oda

Kwang-Hum Han

Si-Youl Chun

Jang-Sub Shim

Noi-Ha Cho

An evaporation source having a nozzle structure that makes the distribution of film thickness uniform in the width direction of a substrate and a vacuum evaporator using the same are provided. A vapor produced by evaporation or sublimation by heating to evaporation material is discharged from a long nozzle opening like a band. A deposited substrate is transferred in a direction perpendicular to the longitudinal direction of the nozzle opening while facing the nozzle opening. A discharge flow rate of vapor per unit area in the longitudinal direction of the nozzle opening is made to be maximum in a portion at a nozzle width direction position corresponding to a substrate edge position rather than a central part of the nozzle opening and a plurality of partition plates providing directivity to the flow of vapor are arranged inside the nozzle opening.

Evaporation source and vacuum evaporator using the same

An alloying system for a galvanized steel sheet, the alloying system using an induction heating coil, wherein an impedance matching apparatus is provided between the induction heating coil and a high frequency power source. The impedance matching apparatus comprises a matching transformer having a plurality of intermediate contact points for arbitrarily selecting a turn ratio, and a switching device for alternative changeover of the intermediate contact point, whereby even when the load impedance of the steel sheet varies, maximum power source output is obtained, such that an appropriate heating temperature necessary for forming an alloy layer of the steel sheet can be supplied.

Impedance matching apparatus for induction heating type galvanized steel sheet alloying system and method

An alloying system for a galvanized steel sheet, using an induction heating coil, wherein the temperature of the steel sheet in an induction heating furnace is measured based on the impedance of a high frequency heater, and the amount of heating is controlled by feedback, to form an alloy layer of the steel sheet.

Alloying system and heating control device for high grade galvanized

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Hiroshima, Japan

Kozo Wada