Mitutoyo Corporation

Kozo Sugita

Takashi Noda

Katsuyuki Ogura

Masakazu Matsumoto

A calibration reference work sphere is measured to obtain measured values by using a probe vector given before updating is made by exchanging the probe for a new one or by changing the posture of the probe. Then, the measured values are error-corrected by using the probe vector given before updating to thereby obtain the coordinates of the center of the reference sphere. The difference between the obtained coordinates and the coordinates of the center of the reference sphere before updating of the probe is obtained to thereby calculate a predicted probe vector. A calibration measurement part program for measuring the calibration reference sphere by using the predicted probe vector is generated and executed for performing calibration measurement. A calibration value of the probe vector is calculated on the basis of the result of the calibration measurement.

Method for calibrating probe and computer-readable medium

An object of the invention is to provide a position measuring apparatus which can execute a stable accuracy assurance at a high accuracy against a deterioration with age and a temperature fluctuation of the apparatus while making a correction of an existing volumetric measuring accuracy effective. In order to achieve the object, in accordance with the present invention, in a position measuring apparatus which measures a target position within a specified coordinate space with respect to a predetermined reference surface ( ) on the basis of a coordinate system so as to compensate errors, there is provided a detector ( ) for measuring whether or not a change is occurred in a relation with respect to the reference surface ( ), in a movement executed by a moving machine ( ), and there is further provided with an error corrector ( ) for correcting at least any one of a compensation parameter compensating a positional coordinates by an error compensator ( ) and a positional coordinate compensated by the error compensator ( ), on the basis of an amount of change of a relation measured by the detector ( ), in the case that the change is occurred.

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Kawasaki, Japan

Kozo Sugita