Sharp Kabushiki Kaisha Corporation

Shinko Electric Company, Ltd.

Kozaburo Yano

Yasuhiro Nakai

Masahiro Tadokoro

Shuji Goma

Hirozumi Gokaku

Yoshihiro Tsukuda

Kazuto Igarashi

Hidemi Mitsuyasu

Koji Yoshida

Toshiaki Nagai

In order to obtain a thin plate manufacturing method capable of extremely increasing manufacturing efficiency by enlarging the production scale and remarkably reducing the manufacturing cost per unit area and an apparatus for manufacturing this thin plate, a method and an apparatus performing introduction of a substrate into a main chamber and discharge of the substrate from the main chamber through at least one subsidiary chamber () adjacent to the main chamber () are employed when manufacturing a silicon thin plate by dipping a surface layer part of the substrate into a silicon melt () in a crucible () arranged in the main chamber () for bonding silicon () to the surface of the substrate.

Thin plate manufacturing method and thin plate manufacturing apparatus

In order to obtain a thin plate manufacturing method capable of extremely increasing manufacturing efficiency by enlarging the production scale and remarkably reducing the manufacturing cost per unit area and an apparatus for manufacturing this thin plate, a method and an apparatus performing introduction of a substrate into a main chamber and discharge of the substrate from the main chamber through at least one subsidiary chamber adjacent to the main chamber are employed when manufacturing a silicon thin plate by dipping a surface layer part of the substrate into a silicon melt in a crucible arranged in the main chamber for bonding silicon to the surface of the substrate.

Thin sheet production method and thin sheet production device

An apparatus for producing a polycrystalline silicon sheet includes a crucible, a heating unit for heating a starting material of silicon fed in the crucible, and a cooling unit for contacting a melt of the starting material melted by heating to a cooling face of a cooling member, thereby obtaining a polycrystalline silicon sheet in which crystals of silicon are grown, wherein the cooling face of the cooling member has a sheet adhering portion for providing a silicon starting point of crystallization and allowing adhesion of the polycrystalline silicon sheet of grown crystals and a sheet stripping portion for allowing easy stripping of the polycrystalline silicon sheet.

Apparatus for producing polycrystalline silicon sheets and production method using the same

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Nabari, Japan

Kozaburo Yano