Toshiba Kikai Kabushiki Kaisha

Kanto Seiki Co., Ltd.

Yugen Kaisha Newly Laboratory

Kouya Watanabe

Akira Ochiai

Katsuji Takahashi

Takao Arai

Koichi Urano

Shumpei Ohtsuka

Kyoichi Ebisawa

A fluid sealing mechanism for sealing fluid being fed into a fluid pressure pocket formed between sliding surfaces which are formed on the opposing surfaces of an article being supported and a support for supporting the article, wherein a ring groove being fitted with a resilient ring for sealing fluid is made in the sliding surface of the support. Under a state where a regulation ring for preventing the resilient ring from jumping out of the ring groove is fitted over the re-silient ring, the regulation ring is fitted in the ring groove along with the resilient ring. When the fluid fed into the fluid pressure pocket reaches a specified pressure, the regulation ring comes into pressure contact with the sliding surface of the support along with the resilient ring, thus preventing the resilient ring from jumping out.

Heavy load support system

In a static pressure table device wherein an annular recess is formed in one of confronting surfaces of a stationary bed and a rotary table thereon, and static pressure oil is supplied to the recess for rotatingly support the table on the bed, a static pressure gap formed between the confronting surfaces of the bed and table is constructed to gradually or stepwisely increase toward the outer periphery of the device. As a result, the viscosity resistance of the pressure oil is decreased toward the outer periphery and heat generation is reduced in the outer peripheral region, whereby a uniform temperature distribution of the table becomes possible with resultant reduced thermal deformation of the table so that the table can be rotated at high speed.

Static pressure table device with a tapered surface

A control system for effecting ultra-precision temperature control for a controlled system having large load fluctuations or including a dead time component. A control unit (5) instructs a high-precision PID temperature controller (10) to renew and correct a control target value T.sub.0,NEW for the supply fluid temperature T.sub.0 only by a temperature difference .DELTA.T=T.sub.C -T.sub.2 between a set value T.sub.C for the return fluid temperature T.sub.2 of a heat transfer fluid and the actually controlled return fluid temperature T.sub.2. In response to the instruction, the high-precision PID temperature controller (10) controls the heating power of a heater (17) for heating control through a constant-power thyristor phase controller (16). The heater (17) heats the heat transfer fluid and sends it to a machining apparatus (1) through a closed damping tank (21). The heat transfer fluid exchanges heat with the machining apparatus (1) and is then returned to a precooling means.

Ultra-precision temperature control system for machine tool and control

A hydrostatic bearing apparatus comprises a base member having a static pressure guide surface to which a static pressure pocket is formed, a temperature detector for detecting a temperature of an operation oil in the static pressure pocket at an outlet portion thereof and generating a signal representing the detected outlet temperature of the operation oil, a temperature controller for controlling a temperature of the operation oil to be supplied in the static pressure pocket in response to the signal from the temperature detector, and a pressure controller for controlling a pressure in the static pressure pocket by controlling a flow rate of the operation oil supplied to the static pressure pocket. An operation oil source storing the operation oil to be supplied to the static pressure pocket is further disposed. A gap between the static pressure guide surface and a member to be supported of the hydrostatic bearing apparatus is maintained always constant in accordance with the control of the operation oil temperature and the operation oil pressure.

Growing community of inventors

Numazu, Japan

Kouya Watanabe