Nippon Tungsten Co., Ltd.

Shinko Electric Industries Co., Ltd.

Japan Fine Ceramics Center

Trek Holding Co., Ltd.

Kouta Tsutsumi

Mitsuyoshi Nagano

Norio Shiraiwa

Koki Tamagawa

Toshio Uehara

Tadayoshi Yoshikawa

Hideaki Matsubara

Miki Saito

Tetsushi Matsuda

Ryou Matsuo

A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 10to 10(&#x3a9;&#xb7;cm) necessary for a Johnsen-Rahbek type electrostatic chuck.

Dielectric layer for electrostatic chuck and electrostatic chuck

A composite ceramic body which includes three phases consisting of a MgO phase, a YAP (YAlO) phase and a spinel (MgAlO) phase. This composite ceramic body has a plasma resistance greater than that of alumina and approximately equal to that of MgO. Mechanical properties, such as hardness and bending strength, of the composite ceramic body, are approximately equal or superior to those of AlO. A raw material cost and a manufacturing cost thereof are lower than those of a rare-earth oxide. Further, electric conductive particles may be added thereto to lower an electrical resistivity. The composite ceramic body is suitably usable as component parts for a semiconductor manufacturing equipment.

Composite ceramic body, and component member for semiconductor manufacturing apparatus

Growing community of inventors

Fukuoka, Japan

Kouta Tsutsumi