Jeol Ltd.

Kouta Itoh

Atsuhiro Fujii

Yuka Otake

A phase analyzer includes a data acquisition unit that acquires a plurality of pieces of spectrum imaging data in which positions on a sample are associated with spectra which are based on signals from the sample; a first acquisition unit that acquires a first representative spectrum group for each piece of spectrum imaging data by performing multivariate analysis on each of the plurality of pieces of spectrum imaging data; a second acquisition unit that acquires a second representative spectrum group by performing multivariate analysis on the plurality of first representative spectrum groups acquired by the first acquisition unit; and a phase analysis unit that performs phase analysis on each of the plurality of pieces of spectrum imaging data by using the second representative spectrum group.

Phase analyzer, sample analyzer, and analysis method

A phase analyzer includes a data acquisition unit that acquires spectrum imaging data in which a position on a sample is associated with a spectrum of a signal from the sample; a candidate determination unit that performs multivariate analysis on the spectrum imaging data to determine candidates for the number of phases; a phase analysis unit that creates, for each of the candidates, a phase map group including a number of phase maps corresponding to the number of phases; and a display control unit that causes a display unit to display, for each of the candidates, the phase map group.

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Tokyo, Japan

Kouta Itoh