Tokyo Electron Limited

Tokyo Electron Kyushu Limited

Tokyo Electron Saga Limited

Kouki Kuroda

Yuuji Kamikawa

Mitsuo Nishi

Yoshiyuki Honda

Eiichi Mukai

A semiconductor wafer cleaning system includes a chemical cleaning section having a process vessel. A holder is arranged in the process vessel. The holder holds 50 wafers at once. Fifty grooves for receiving peripheral portions of wafers are formed on the holder. Fifty wafers are passed/received all together by a chuck having a pair of opening/closing arms to/from the holder. Fifty grooves for receiving peripheral portions of wafers are formed on each arm. A positioning apparatus is used to correct the offset of the relative position between the chuck and the holder from a reference relative position for transfer of wafers. The positioning apparatus has a detection unit which can be mounted on the chuck and has image pickup sections on two end portions. Each image pickup section simultaneously images a groove on the chuck and a corresponding groove on the holder. The resultant images of the two grooves are displayed within the same coordinate system on a monitor to be superposed on each other. The chuck and the holder are relatively moved to correct the offset between the images of the two grooves, thereby correcting the offset of the current relative position from the reference relative position.

Semiconductor process system and positioning method and apparatus for

A washing system comprising a wafer washing section having plural chemical washing vessels, plural water washing vessels and a drier, a cassette washing section having a water washing device and a drier, a loader section for taking out the wafers from the cassettes and loading the wafers into the wafer washing section, an unloader section for returning the washed wafers in the washed cassette and unloading the wafers from the wafer washing section, a wafer transfer device the wafers in the wafer washing section, a cassette lifter for carrying the cassettes from the loader section to the cassette washing section, and a wire drive unit for carrying the cassettes in the cassette washing section.

Washing system

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Kurume, Japan

Kouki Kuroda